用于微机电系统电源的贝塔辐伏电池研究进展

Research progress of betavoltaic batteries for MEMS power supplies

贝塔辐伏电池是能够将放射性同位素发出的贝塔射线转化为电能的装置,具有高环境适应性、超长寿命、超大功率密度、小体积、高稳定性等诸多优点,是微机电系统(MEMS)电源发展的重要研究方向。随着半导体制作工艺的发展,基于P-N结和肖特基结换能结构的贝塔辐伏电池表现出良好的应用前景。对贝塔辐伏电池的发展历史和研究现状进行了综述,并对其未来的发展进行了展望。

Betavoltaic batteries can convert β radiation energy released from the radioisotopes into electrical energy,it has many unique features including high environmental resistance,long-life,high power density,small size,and high stability. With the fast development of semiconductor technology,betavoltaic batteries basing on P-N junctions and Schottky junctions have shown promising application prospects especially as the MEMS power supplies. In this work,we summarized the development history and research status of Beta-voltaic batteries,and prospect for its future development.