高纯镱晶间杂质组成及形成原因研究

Composition and Formation of Intercrystalline Impurities in High Purity Ytterbium

高纯度稀土金属Yb靶材在气相沉积镀膜领域具有广泛应用,但目前还原-蒸馏法制备的Yb中弥散分布的黑色杂质严重影响了镀膜膜层的质量。采用XRD,SEM,EDS和碳硫分析仪等检测手段对Yb中黑色杂质的组成和形貌特征进行研究,结果表明杂质是以颗粒形式赋存于晶界的稀土氢化物。稀土氢化物杂质中的H主要由被污染的还原剂La以稀土氢化物和吸附水分子的形式带入反应器,其含量与温度、湿度等环境状态因素密切相关。此外,针对带有黑点的不合格Yb也提出了对应的解决策略,该研究为生产高质量的稀土金属Yb提供了技术保障。

Ytterbium(Yb)target with high purity has been widely used in the field of physical vapor deposition(PVD)coating.However,the dispersed black impurities in the metal prepared by the reduction-distillation method seriously affect the quality of the coating film.In this paper,the composition and morphology of black impurity in the ytterbium were studied by XRD,SEM,EDS and carbon sulfur analyzer.The results showed that the impurities are rare earth hydrides existing in grain boundary in the form of particles.The hydrogen in rare earth hydride impurities is mainly brought into the reactor in the form of rare earth hydride and adsorbed water molecules by the contaminated reducing agent metal lanthanum.Its content is closely related to environmental factors such as temperature and humidity.In addition,a corresponding solution strategy was proposed for the unqualified metal Yb with black spots.The research provided a technical guarantee for the production of high-quality metal ytterbium.