基于偏振激光共聚焦的研磨石英玻璃亚表面损伤检测

Polarized laser confocal technique for subsurface damage of lapped quartz glass

石英玻璃在研磨过程中会不可避免地产生亚表面损伤,对石英玻璃亚表面损伤的检测一直是石英玻璃加工工艺优化中的热点。本文结合偏振激光散射法及激光散射共聚焦法,提出了基于偏振激光共聚焦的研磨石英玻璃亚表面损伤的无损检测方法。搭建无损检测系统,对采用不同金刚石研磨液研磨的石英玻璃亚表面损伤进行检测,并采用横截面显微有损检测法对同一批石英玻璃检测结果进行验证。对比无损和有损检测结果,亚表面损伤深度的相对误差在5%以内,亚表面裂纹构型基本一致。结果表明,偏振激光共聚焦无损检测方法可实现研磨石英玻璃亚表面损伤的定量、非破坏检测,可为后续石英玻璃的加工工艺优化提供有效的检测手段。

Subsurface damage is generated during the lapping process of quartz glass. The detection of subsurface damage has been a research focus in the lapping process optimization of quartz glass. This study proposes a nondestructive detection method to detect the subsurface damage of lapped quartz glass. By combining the polarized laser scattering method with the confocal scattering microscopy method,a polarized laser confocal nondestructive detection method for the subsurface damage of lapped quartz glass was proposed,and a nondestructive detection system was developed. In addition,the subsurface damage of lapped quartz glass was detected,and the cross-sectional microscopic destructive method was used to verify the nondestructive detection results. The comparison results of nondestructive detection and destructive detection indicate that the relative error of subsurface damage depth is less than 5%,and the subsurface crack configuration is consistent with that of the destructive detection method. The polarized laser confocal nondestructive detection method can quantitatively detect the subsurface damage of lapped quartz glass.Thus,the study provides an effective detection method for the optimization of quartz glass processing.