一种两叠层结构TFT-LCD的端子腐蚀研究

Study on Terminal Corrosion of TFT-LCD with two Laminated Structures

TFT-LCD产品的腐蚀问题是影响产品品质的主要问题之一,该文研究的腐蚀与一种新型的叠层设计有强相关。这种腐蚀在新的叠层设计应用以前没有出现过,且在新产品上只出现在叠层位置。我们通过对腐蚀位置大量的聚焦离子束(focused ion beam,FIB)分析,建立了失效模型:该腐蚀与两层金属(M3、M2)之间距离d有强相关,d值较小时绝缘膜(PA2)不能对M3金属形成有效的保护,在高温高湿环境下M3金属易被腐蚀。另外,该项目创新了一种通过泡酸验证产品抗腐蚀性能的方法,相比RA实验,大大缩短了验证时间,在该项目中也使用该方法对腐蚀模型的准确性进行验证。基于腐蚀的失效模型,我们对d值相关的工艺参数进行了优化调整,调整后该模式腐蚀未再出现,产品品质得到提升。

The corrosion of TFT-LCD products is one of the main problems affecting the quality of products.The corrosion studied in this paper is strongly related to the design of a new Laminated layer.This corrosion has not been seen in the normal design before,and only appears in the new product where the new Laminated layer is designed.Based on a large number of Focused Ion beam(FIB)analysis of the corrosion location,the failure model was established.The corrosion is strongly correlated with the distance d between two layers of metal(M3,M2),and the insulation film(PA2)cannot form effective protection against M3 metal when the d value is small,and M3 metal is easy to corrode at high temperature and humidity.In addition,this project in novated a method to expose the product quality risk by soaking acid,which greatly shortened the test time compared with RA experiment.This method was also used in this project to verify the accuracy of the corrosion model.Based on the failure model of corrosion,we have optimized the process parameters related to the d value,after which the corrosion of the pattern has not reappeared and the product quality has been improved.