超导重力仪球形电容位移传感器仿真分析

Simulation of spherical capacitance displacement sensor for superconducting gravitometer

以GWR超导重力仪中超导球为对象,对球形电容位移传感技术进行了仿真研究,分析了超导球与极板的零位间距、极板圆心角两个因素对球形电容线性度和灵敏度的影响。结果表明:零位间距增大,非线性误差减小,灵敏度减小;极板圆心角增大,灵敏度也增大,而非线性误差减小。

Taking the superconducting ball in the Goodkind Warburton and Reineman(GWR) superconducting gravimeter as the object, the spherical capacitance displacement sensing technology was simulated and analyzed, and the effects of the two factors including zero spacing between the superconducting ball and the pole plate as well as the pole plate center angle on the linearity and sensitivity of the spherical capacitance were analyzed. The results show that: with the increase of the zero distance, the nonlinear error and the sensitivity decrease. With the increase of the center angle of the polar plate, the sensitivity increases, and the the nonlinear error decreases.