太赫兹焦平面阵列芯片技术

Review on terahertz focal plane array chip technology

太赫兹焦平面阵列成像具有成像帧率高、凝视前视、实孔径成像的优点,是太赫兹成像技术中最具有可持续发展价值的技术途径之一。太赫兹焦平面阵列是太赫兹焦平面成像系统中的核心组件,其性能直接影响太赫兹焦平面阵列成像系统的灵敏度和分辨率。首先,介绍了太赫兹焦平面阵列的基本概念,包括系统工作原理、典型架构以及像素级太赫兹探测器;然后,分别介绍了检波式太赫兹焦平面阵列和混频式太赫兹焦平面阵列的发展现状;最后,总结了太赫兹焦平面阵列的关键技术和发展趋势。

Terahertz focal plane array imaging is one of the most promising technology that has the advantages of high frame rate,staring imaging and real aperture imaging.As the core component in the terahertz focal plane imaging system,the terahertz focal plane array determines the sensitivity and resolution of the system.Firstly,the basic concepts of terahertz focal plane array is illustrated,including the system principle,typical architecture and pixel-level terahertz detector.Secondly,state-of-the-art of the terahertz focal plane array in directly-detection mode and mixing mode is presented respectively.Finally,critical technologies and development trends are summarized.