快速高精度电动调整镜研究

Fast and high-precision electric adjusting mirror

高能激光合束系统中反射镜在工作前需要进行快速高精度的指向调整。设计了一种二维电控调整镜,系统主体采用一体化的柔性支撑设计,驱动采用步进电机配合减速机构带动螺杆实现,反射镜偏转角度的精密测量采用电涡流传感器,使用数字信号处理器(DSP)作为主控模块。对系统的工作原理和设计进行了分析,对系统标定方法和控制算法进行了深入研究。为了满足系统调整速度的要求,采用S形加减速算法作为调整镜的控制算法,采用分段线性的系统标定方法。最后对系统进行了实验测试,结果表明,在±500″角度范围内,调整镜到位时间在3 s以内,控制误差小于2″,可以满足系统要求。

The mirror in the high-energy laser beam combining system needs to make a fast and high-precision pointing adjustment before working.A two-dimensional electrically controlled adjusting mirror was designed.The main body of the system adopted an integrated flexible support design,the drive adopted a stepping motor and a deceleration mechanism to drive the screw,the precision measurement of the mirror deflection angle adopted an eddy current sensor,and the digital signal processor(DSP)was adopted as the main control module.The working principle and design of the system were analyzed,and the system calibration method as well as the control algorithm were deeply studied.In order to meet the requirements of system adjustment speed,the S-shaped acceleration and deceleration algorithm was adopted as the control algorithm of adjusting mirror,and the system calibration method with piecewise linearity was adopted.Finally,the system was tested experimentally.The experimental results show that within the angle range of±500″,the in-position time of adjusting mirror is within 3 s,and the control error is less than 2″,which can meet the system requirements.