摘要
射频MEMS开关以及以开关为基础的射频MEMS器件是应用于5G通信中的重要组成部分。随着通信技术的发展,多种类射频MEMS器件得到广泛应用,定期对生产批次射频MEMS器件进行筛选和检测成为关键。目前射频MEMS器件性能的快速无损检测,依旧是行业内没有很好解决的难题。以铜制弹片为媒介,针对表面贴装式集成封装射频器件,设计高性能、高精度、快速无损伤测试夹具。通过对测试夹具进行多次仿真和实验,证实测试夹具测试射频器件频率可达2 GHz并且测试夹具本身损耗很低。
Radio frequency MEMS switches and Radio frequency MEMS devices based on switches are important components in 5 G communication.With the development of communication technology,many kinds of radio frequency MEMS devices are widely used.It is critical to screen and test the batch radio frequency MEMS devices regularly.At present,rapid nondestructive testing of radio frequency MEMS device performance is still a difficult problem in the industry.The article uses copper shrapnel as a medium to design high-performance,high-precision,fast and non-destructive test fixture for surface-mounted integrated packaged radio frequency devices.Through many simulations and experiments on the test fixture,it is confirmed that the test frequency of the test fixture can reach 2 GHz and the loss of the test fixture itself is very low.
作者
王耀利
张凯旗
张翀
程亚昊
韩路路
Wang Yaoli;Zhang Kaiqi;Zhang Chong;Cheng Yahao;Han Lulu(School of Electrical and Control Engineering,North University of China,Taiyuan 030051,China;Center for Microsystem Intergration,North University of China,Taiyuan 030051,China;School of Information and Communication Engineering,North University of China,Taiyuan 030051,China;School of Instrument and Electronics,North University of China,Taiyuan 030051,China)
出处
《国外电子测量技术》
北大核心
2021年第9期106-110,共5页
Foreign Electronic Measurement Technology
关键词
测试夹具
弹片
射频MEMS器件
test fixture
copper shrapnel
radio frequency MEMS device
