晶圆传输平台轨迹规划与控制算法研究

Research on Trajectory Planning and Control Algorithm of Wafer Transmission Platform

为保证晶圆的平稳快速传输,基于末端位姿调整算法搭建了晶圆传输实验平台,并根据晶圆传输过程中的受力情况得到了末端执行器角度与最大加速度之间的关系,通过基于位姿调整的S加速算法得到了晶圆机器人运行轨迹。针对晶圆传输平台非线性、强耦合的特点,建立了晶圆传输平台动力学模型,提出了基于干扰观测器的线性化反馈方法对控制系统进行线性化解耦,通过积分滑模控制来保证控制系统动态性能并提高鲁棒性。最后在Simulink中搭建控制系统仿真模型,验证了算法的有效性。

In order to improve the transmission efficiency of wafer transport robot,the research group built an experimental platform for wafer transmission based on the end-pose adjustment algorithm,obtained the relationship between the end-effector angle and the maximum acceleration according to the stress during wafer transmission,and obtained the running trajectory of the wafer robot through the S-acceleration algorithm based on orientation adjustment.Then,according to the nonlinear and strong coupling characteristics of the wafer transmission platform,a dynamic model of the wafer transmission platform is established,a linearized feedback method based on disturbance observer is proposed to decouple the control system linearly,and then integrated sliding mode control is used to guarantee the dynamic performance of the control system and improve its robustness.Finally,a control system simulation model is built in Simulink to verify the effectiveness of the algorithm.