摘要
介绍了MOCVD设备射频感应加热系统的工作原理及技术特点。结合射频感应加热系统的组成,详细叙述各主要模块的典型故障及维修技术,重点分析射频功率源电路故障及维修。针对射频系统阻抗失配现象,提出了阻抗匹配调整的实用方法。根据多年的设备维护经验,归纳MOCVD设备射频感应加热系统的常见故障,给出了快速检查处理措施。
The working principle and technical characteristics of the RF induction heating system of MOCVD are introduced.Combined with the composition of the RF induction heating system,the typical faults and maintenance technology of each main module are described in detail,and the RF power source circuit faults and maintenance are analyzed emphatically.Aiming at the impedance mismatch of RF system,a practical method of impedance matching adjustment is proposed.Based on the experience of equipment maintenance for many years,the common faults of the RF induction heating system of MOCVD equipment are summarized,and the fast inspection and treatment measures are given.
作者
刘成群
程壹涛
刘宇宁
LIU Chengqun;CHENG Yitao;LIU Yuning(The 13^(th) Research Institute of CETC,Shijiazhuang 050051,China)
出处
《电子工业专用设备》
2021年第5期16-21,共6页
Equipment for Electronic Products Manufacturing
关键词
金属有机物化学气相淀积
射频感应加热
阻抗匹配
振荡器
Metal-Organic Chemical Vapor Deposition(MOCVD)
RF induction heating
Impedance matching
Oscillators
