离子束刻蚀技术与设备常见故障分析

Ion Beam Etching Technology and Analysis of Common Failures of the Equipment

介绍了离子束刻蚀技术的特点及其基本原理,并以某型号离子束刻蚀机为例,重点介绍了该设备组成结构与工作原理。同时,根据以往维修经验,总结归纳了该设备的常见故障,并对故障原因进行了深入分析,给出了相应的解决措施。

This paper introduces the characteristics and basic principle of Ion Beam Etching technology.Meanwhile,taking a model of Ion Beam Etching equipment as an example,the structure and working principle of the equipment are mainly introduced.At the same time,according to the previous maintenance experience,the common faults of the equipment are summarized,the causes of the faults are deeply analyzed,and the corresponding solutions are given.