摘要
介绍了两种基于面阵相机识别生成晶圆图谱(Wafer Map)的算法,并对两种算法的执行效率和适用范围进行了比较,两种算法根据执行效率和适用范围的不同,应用于不同的半导体设备。
Two algorithms for generating Wafer Map based on area array camera recognition are introduced in this paper.The execution efficiency and application range of the two algorithms are compared.The two algorithms are applied to different semiconductor devices according to different execution efficiency and application range.
作者
周丹
霍杰
袁晓春
崔洁
ZHOU Dan;HUO Jie;YUAN Xiaochun;CUI Jie(CETC Beijing Electronic Equipment Co.,Ltd.,Beijing 100176,China)
出处
《电子工业专用设备》
2021年第5期39-41,共3页
Equipment for Electronic Products Manufacturing
关键词
面阵相机
相机识别
晶圆图谱
算法应用
Area array camera
Recognition
Wafer Map
Algorithm Application
