MEMS矢量水听器海洋环境适应性研究

Adaptability of MEMS Vector Hydrophone to Marine Environment

海流、温度及压力等复杂海洋环境因素会对微机电系统(micro-electro-mechanical-system,简称MEMS)矢量水听器正常工作产生干扰,影响其对微弱声信号的拾取能力。首先,建立了基于"三明治"式抗流封装结构数学模型,通过仿真得到了不同抗流结构参数对海流噪声抑制效果;其次,利用Comsol软件仿真研究了海水温度、水深(静水压强)等变化对MEMS矢量水听器灵敏度的影响;最后,通过试验验证,得出了"三明治"式抗流封装结构具有20 dB以上的抑制流噪声能力,在0~40℃的海水温度范围内MEMS矢量水听器的灵敏度变化量小于±0.5 dB,在0~12 MPa的静水压强范围内灵敏度变化量小于±0.9 dB,与理论分析及仿真结果基本一致。

The complex marine environment factors such as current,temperature and pressure can interfere with the normal operation of micro-electro-mechanical system(MEMS)vector hydrophone and affect its ability to pick up weak acoustic signals.Firstly,a"sandwich"type anti-current packaging structure mathematical model is established,and the effect of different anti-current structure parameters on ocean current noise suppression is obtained through simulation.Secondly,the effects of sea water temperature and water depth(hydrostatic pressure)on the sensitivity of MEMS vector hydrophone are simulated by Comsol software.Finally,the experimental results show that the sandwich encapsulating structure can suppress the flow noise more than 20 dB.The sensitivity variation of MEMS vector hydrophone is less than±0.5 dB in the range of 0~40℃seawater temperature and less than±0.9 dB in the range of 0~12 MPa hydrostatic pressure,which is basically consistent with the theoretical analysis and simulation results.