光学检漏的试验时间问题

Test Time in Optical Leak Testing

光学检漏(OLT)是一种新型的密封器件检漏技术。该方法的最小可检测等效标准漏率在封装盖板刚度和腔体体积确定的情况下,与试验时间及试验腔室的压力密切相关。本文重点讨论盖板刚度与试验时间的相关性,并给出了各种腔体体积下为确保足够的检漏灵敏度所必需的最短试验时间。

Optical leak testing(OLT)is a new leak testing method for hermetic sealed devices.Under the certain lid stiffness and the volume of the package cavity,the minimum measurable equivalent standard leak rate of OLT is closely related to the test time and the pressure of testing chamber.The relationship between the lid stiffness and the test time of OLT is discussed in this paper.The minimum test time to ensure the sufficient sensitivity of testing is studied with different cavity volume.