A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements

As standard concepts for precision positioning within a machine reach their limits with increasing measurement volumes,inverse concepts are a promising approach for addressing this problem.The inverse principle entails other limitations,as for high-precision positioning of a sensor head within a large measurement volume,three four-beam interferometers are required in order to measure all necessary translations and rotations of the sensor head and reconstruct the topography of the reference system consisting of fixed mirrors in the x-,y-,and z-directions.We present the principle of a passive heterodyne laser interferometer with consequently separated beam paths for the individual heterodyne frequencies.The beam path design is illustrated and described,as well as the design of the signal-processing and evaluation algorithm,which is implemented using a System-On-a-Chip with an integrated FPGA,CPU,and A/D converters.A streamlined bench-top optical assembly was set up and measurements were carried out to investigate the remaining non-linearities.Additionally,reference measurements with a commercial homodyne interferometer were executed.