摘要
This study explores a novel WNbMoTaV high-entropy thin film(HETF)in amorphous structure via pulsed laser deposition system.The formation of amorphous structure of this high-entropy alloy is ascribed to the high cooling rate during the deposition process.The HETF shows a smooth surface with a height fl uctuation of less than 13 nm.This film has a high electrical resistivity of~320.6μΩ·cm and a low corrosion current density of 0.088μA/cm 2.The corrosion resistance of the HETF at ambient temperature is superior to the conventional AISI 316 L stainless steel.The high electrical resistivity and excellent corrosion resistance of the HETF are mainly attributed to its chemical disorder,cocktail effect and homogeneous amorphous structure.This experimental phenomenon not only provides a basis for the preparation of amorphous alloy films with low glass forming ability by pulsed laser deposition system,also promotes the potential application of WNbMoTaV HETF in the microelectronic components as resistivity sensors.
基金
financially supported by the National Natural Science Foundation of China(Grant No.51801128)
the Natural Science Foundation of Guangdong Province,China(Grant No.2021A1515012278)
the Shenzhen Science and Technology Innovation Committee(Peacock Plan 827-000351)
the Natural Science Foundation of Shenzhen University(Grant No.860-000002110212)。
