全刻蚀型布拉格波导光栅滤波性能研究

Study on Properties of Fully Etched Bragg Grating Waveguide Filters

提出了一种基于绝缘层上硅波导的全刻蚀布拉格光栅滤波器。该器件可通过对顶部硅的一步刻蚀来实现,其特性使布拉格波长的调谐更加灵敏和有效。仿真研究结果表明,其一阶和三阶光栅的周期对波长调谐系数分别为33 nm/nm和11 nm/nm,光栅刻槽折射率对波长的调谐系数为1 nm/0.006。将光栅脊与刻槽的小折射率差与高阶光栅相结合,可以实现1550 nm波段更窄带宽的全刻蚀光栅滤波器。

A fully etched Bragg grating filter based on Silicon-On-Insulator(SOI)waveguide is proposed.The full-etched feature makesthe tuning on Bragg wavelength more sensitive and efficient,which can be fabricated by one-step top silicon etching.The simulation results show that the wavelength-period tuning coefficient of 33 nm/nm and 11 nm/nm for the first-and third-order gratings are obtained respectively,groove refractive index tuning has a coefficient of 1 nm/0.006.Combining low refractive index contrast of grating bar and groove with higher grating order,the full-etched grating filter with a narrower bandwidth at 1550 nm band can be realized.