基于Petri网与多代理的半导体调度系统建模及仿真

Modeling and simulation of semiconductor scheduling system based on Petri Net and multi-agent

为解决半导体生产系统作业调度问题,提出了一种基于层次赋时着色Petri网(HTCPN)与多代理系统(MAS)的调度系统建模与仿真方法。以半导体“图案成型”生产系统为对象,分析该系统调度问题的约束条件和多目标函数,设计MAS的组织结构和基于招标-投标策略的调度机制,结合HTCPN建模方法建立调度系统模型,最后采用仿真软件CPN Tools验证了该调度系统的可行性和有效性。

To solve the scheduling problem in semiconductor manufacturing system,a modeling and simulation method based on hierarchical timed colored Petri Net(HTCPN)and multi-agent system(MAS)is proposed.This paper uses the semiconductor pattern forming production system as the research object,analyzes the constraints and multi-objective function of the semiconductor-scheduling problem,then designs the organization structure and scheduling mechanism of MAS based on the Bidding Strategies.The HTCPN modeling method is used to establish the scheduling system model.Finally,CPN Tools is used to verify the feasibility and effectiveness of the scheduling system.