摘要
In the present work,ferrite(Fe)doped TiO_(2)thin films with different volume percentage(vol%)were synthesized using a spray pyrolysis technique.The effect of Fe doping on structural properties such as crystallite size,texture coefficient,microstrain,dislocation densities etc.were evaluated from the X ray diffratometry(XRD)data.XRD data revealed a polycrystalline anatase TiO_(2)phase for sample synthesized up to 2 vol%and mixed anatase and rutile crystalline phase for sample synthesized at 4 vol%Fe doped TiO_(2).The crystalline size was observed to decrease with increase in Fe dopant vol%and also other structural parameters changes with Fe dopant percentage.In the present work,electrical resistance was observed to decrease with a rise in Fe dopant vol%and temperature of the sample.Thermal properties like temperature coefficient of resistance and activation energy also showed strong correlation with Fe dopant vol%.Humidity sensing properties of the synthesized sample altered with a change in Fe dopant vol%.In the present paper,maximum sensitivity of about 88.7%for the sample synthesized with 2 vol%Fe doped TiO_(2)and also the lowest response and recovery time of about 52 and 3 s were reported for the same sample.
