摘要
从铌酸锂电光调制器的工作原理出发,介绍了不同种类的薄膜铌酸锂波导技术和近年来部分具有代表性的薄膜铌酸锂电光调制器研究进展,并对未来发展所面临的挑战和前景进行了展望。
The operating mechanism of LN electro-optic modulators was introduced in the beginning.Then different fabrication technologies of thin-film LN waveguides and several representative advancements of integrated electro-optic modulators were emphatically reviewed.Finally,challenges and opportunities of the thin-film LN modulators were discussed.
作者
秦妍妍
吴立枢
陈泽贤
钱广
张晓阳
张彤
QIN Yanyan;WU Lishu;CHEN Zexian;QIAN Guang;ZHANG Xiaoyang;ZHANG Tong(Joint International Research Laboratory of Information Display and Visualization,School of Electronic Science and Engineering,Southeast University,Nanjing 210096,CHN;Science and Technology on Monolithic Integrated Circuits and Modules Laboratory,Nanjing Electronic Devices Institute,Nanjing 210016,CHN;Suzhou Key Laboratory of Metal Nanooptoelectronic Technology,Southeast University,Suzhou Campus,Suzhou Jiangsu 215123,CHN)
出处
《光电子技术》
CAS
2021年第3期159-166,共8页
Optoelectronic Technology
基金
微波毫米波单片集成和模块电路重点实验室基金资助项目(614280304011901)。
关键词
薄膜铌酸锂
电光调制器
光子集成
thin-film lithium niobate
electro-optic modulator
integrated photonics
