基于硅微通道阵列的光纤面板制备

Fabrication of Optical Fiber Panel Based on Silicon Microchannel Array

基于光纤面板传像原理,提出了一种新型光纤面板的制作方法。采用光辅助电化学方法制备了硅微通道阵列,并将其作为光纤面板的骨架结构,通过氧化工艺在通道内壁制备二氧化硅层作为光纤包层,内部填充高折射率玻璃作为纤芯,制备出一种新结构的传像器件。其理论数值孔径为1.37,经初步测试,其分辨率可达到57 lp/mm。利用此方法制备的光纤面板不会有光串扰问题,可完全避免刀口响应,增加对比度。此方法能有效提高分辨率,有望成为制造高分辨率、高质量传像器件的新方法。

A new type of optical fiber panel manufacturing method was proposed.Based on the image transmission principle of optical fiber panel,silicon micro-channel array was fabricated by photo-assisted electrochemical method,which was used as the skeleton structure of the optical fiber panel.Silicon dioxide layer was prepared on the inner wall of the channel by oxidation process as the fiber cladding.High refractive index glass was filled in the inner wall as the fiber core.The theoretical numerical aperture is 1.37 and the resolution is 57 lp/mm.The optical fiber panel prepared by this method has the advantages of no optical crosstalk,good light collecting capacity,simplicity,easy operation,low cost,capability of effectively improving the number of pixels.The method is expected to become a new method for manufacturing high-resolution and high-quality image transmission devices.