摘要
采用微波等离子体化学气相沉积法(MPCVD),以硬质合金(YG6)为基底,通过固定碳源浓度10%,腔体压强4 kPa,并控制腔内温度分别为700℃、750℃和800℃制备了不同基底温度的硬质合金基金刚石涂层样品。使用XRD、SEM、EDS、Nano Test等方法研究了样品的物相结构、成分、微观形貌和纳米硬度。结果表明:涂层颗粒尺寸约为100~200 nm,表面平滑,且随着温度升高,样品晶粒尺寸略有增大,结晶更加完善,表面纳米硬度呈升高趋势,约为50 GPa。
Cemented carbide based diamond coating samples with different substrate temperatures were prepared by microwave plasma chemical vapor deposition method(MPCVD)with cemented carbide(YG6)as the substrate,fixed carbon source concentration of 10%,chamber pressure of 4 kPa,and controlled preparation temperature of 700℃,750℃and 800℃,respectively.The phase structure,composition,microstructure,nano-hardness and elastic modulus of the samples were studied by XRD,SEM,EDS and Nano Test.The results showed that the particle size of the coating was about 100~200 nm.With the increase of preparing temperature,the grain size of the sample increased,and the crystallization came better.The surface nano-hardness showed an increasing trend,and about 50 GPa.
作者
叶嗣林
王天乐
黄国波
YE Si-lin;WANG Tian-le;HUANG Guo-bo(Zhejiang Lawrence Machine Tool Company Limited,Zhejiang Taizhou 318059;School of Pharmaceutical and Materials Engineering,Taizhou University,Zhejiang Taizhou 318000,China)
出处
《广州化工》
CAS
2021年第23期31-34,共4页
GuangZhou Chemical Industry
基金
浙江省重点研发计划项目(No:2019C04012)
浙江省教育厅一般科研项目(Y201738304)。
关键词
MPCVD
金刚石涂层
制备温度
微结构
力学性能
MPCVD
diamond coating
preparation temperature
microstructure
mechanical property
