紫外固化铝增强型椭球反射镜光学薄膜设计及镀制方法

Ultraviolet Cure Aluminum Enhanced Ellipsoid Reflector Optical Film Design and Coating

增强型光学薄膜通过在铝膜上交替镀制多层介质薄膜,可提升局部波长范围的反射率。由于深椭球反射镜的曲面特性,膜层反射率从底部至外侧不一致,外侧的反射率略低。文章介绍了紫外固化系统用深椭球反射镜的铝增强型反射膜层设计及镀制工艺。实验表明,铝增强型膜可比铝膜提升7%的反射率;同时提升铝膜层表面的保护效果,增加了膜层强度和耐用性,达到了设计要求。

Aluminum enhanced optical films can improve the reflectivity of part wavelength range by alternately deposition multilayer dielectric films on aluminum films. Due to the curved surface of the deep ellipsoid mirror, the reflectance of the film layers is inconsistent from the bottom to the outside, and the outside reflectance is lower. In this paper, the design and deposition method of deep ellipsoid ultraviolet reflection aluminum enhanced optical thin film used for UV cure system are introduced. Experiment shows that the reflectivity of aluminum enhanced film can be increased by 7%.At the same time, it improves the protection effect of the surface of aluminum film layer, increases the strength and durability of the film layer, and meets the target requirements.