激光通信一体化SiC/Al摆镜支撑参数优化

Optimization for support parameters of integration SiC/Al tilt-mirror used for laser communication

在组网"一对多"激光通信系统中,为了减小安装面平面度误差对反射镜面形的影响,保证组网"一对多"激光通信用伺服摆镜安装后的面形精度,对一体化SiC/Al摆镜支撑参数开展了理论分析,分析了各支撑参数对摆镜面形精度的影响规律。然后采用有限元分析优化设计了支撑参数,确定了支撑点位置和安装面平面度精度的要求。对采用优化设计参数后的摆镜面形精度测试表明,在加工面形为PV值优于53 nm(λ/12),RMS值优于10 nm(λ/60)的前提下,并在(20±5)℃温度载荷作用下,摆镜安装后的面形精度PV值优于210 nm(λ/3),RMS值优于60 nm(λ/10)。同时,摆镜与安装基座由相同材料制作,这有效减小温度变化负载对面形精度的影响,完全满足组网"一对多"激光通信伺服摆镜面形的精度指标要求。

In the "one-point to multiple-points" network laser communication system,in order to reduce the effect of flatness error of mounting surface plane on surface shape accuracy of reflective mirror,make sure the surface shape accuracy of the servo tilt-mirror for the "one-point to multiple-points " network laser communication,the theory analysis of support parameters of integration SiC/Al tilt-mirror was proposed.The effect rule of each parameters on the tilt-mirror surface shape accuracy was analyzed.The support parameters were designed optimally by finite element analysis,and the support point position and the flatness accuracy requirement of the mounting surface plane were defined.The test of surfaces shape accuracy of tilt-mirror using the design parameters after optimation shows that under the premise that the peak and valley(PV) value of the processed surface is better than 53 nm(λ/12),and the root mean square(RMS) value is better than 10 nm(λ/60),with a temperature load of(20±5) ℃,the tilt-mirror is installed,the PV value of the its surface shape accuracy is better than 210 nm(λ/3),and the RMS value is better than 60 nm(λ/10).In addition,the tilt-mirror and the mounting base are made of the same material,which effectively reduces the influence of the temperature change load on the surface shape accuracy.It meets the indicator requirement of servo tilt-mirror surface shape accuracy of the "one-point to multiple-points" network laser communication system.