摘要
结合理论方法研究和具体硬件的设计,提出一种基于铌酸锂单晶基片的三频点标准超声换能器,由单片机控制DDS芯片产生3种频率的正弦信号,经过高频运算放大器电路,对标准超声换能器激励输出标准超声功率,从而形成三频点标准超声功率源,可作为一种超声功率传递标准。三频点标准超声功率源实现了18.9 MHz高频超声波的输出。和英国NPL测量比对的结果显示,3个频率点上的超声功率值误差均不大于±5%,验证了三频点标准超声功率源输出数据的有效性。
Combining theoretical method research and specific hardware design,a three-frequency standard ultrasonic transducer based on Li Nb O3 single crystal substrate is proposed.The DDS chip is controlled by a single-chip microcomputer to generate sinusoidal signals of three frequencies.After a high-frequency operational amplifier circuit,the standard ultrasonic transducer is excited to output standard ultrasonic power,thereby forming a three-frequency standard ultrasonic power source,which can be used as a standard for ultrasonic power transmission.The three-frequency standard ultrasonic power source realizes the output of 18.9 MHz high-frequency ultrasonic waves.The results of comparison with the British NPL measurement show that the error of the ultrasonic power value at the three frequency points is not more than ± 5%,which verifies the validity of the data output by the three-frequency point standard ultrasonic power source.
作者
陈沈理
郭广建
李敏毅
CHEN Shen-li;GUO Guang-jian;LI Min-yi(Guangdong Institute of Metrology,Guangzhou,Guangdong 510405,China;Guangdong Provincial Key Laboratory of Modern Geometric and Mechanical Metrology Technolgy,Guangzhou,Guangdong 510405,China)
出处
《计量学报》
CSCD
北大核心
2021年第11期1488-1493,共6页
Acta Metrologica Sinica
关键词
计量学
超声功率测量
标准超声换能器
铌酸锂基片
DDS
三频点超声功率源
metrology
ultrasonic power measurement
standard ultrasonic transducer
lithium niobate substrate
DDS
three-frequency ultrasonic power source