SAW微压力传感器声流耦合域建立与分析

Establishment and Analysis of Acoustic⁃flow Coupling Domain Model for SAW Micro⁃pressure Sensor

在外界流体环境微扰动影响下,声表面波(surface acoustic wave)微压力传感器相关参数会发生改变,影响测量数据。文中使用有限元分析方法,建立一种声表面波与流体域耦合模型。通过COM⁃SOL软件仿真,分析对比数据结果,发现在0~300 MHz频率范围内,施加温度为293.15 K的流体传热物理场时,声表面波传播位移与主应力均受影响,不稳定波动幅度达到0~1.2 mm。研究结果表明,该耦合模型能够有效分析流体作用时SAW传感器传播数据状态变化,有助于研究SAW微流体领域非线性误差问题及其后续修正补偿方法。

When surface acoustic wave micropressure sensor was affected by the external fluid microdisturbance,its parame⁃ters will change and influence the measurement data.In this paper,a coupling model of surface acoustic waves with fluid domain was established by finite element method.Through COMSOL software simulation,analysis of data results show that when the 293.15 K fluid transfer field was applied within the frequency range of 0~300 MHz,both the acoustic surface wave propagation displacement and the principal stress were affected,and the unstable fluctuation reached 0~1.2 mm.The results show that the coupling model can effectively analyze the SAW sensor propagation data during fluid action,which is helpful to study the nonlin⁃ear error in the field of SAW microfluid and its subsequent compensation methods.