基于MEMS的微热板结构仿真优化研究

Research on simulation and optimization of micro-hot plate structure based on MEMS

金属氧化物半导体气敏传感器是气体传感器领域研究的热点内容,而微热板作为金属氧化物半导体气体传感器的重要组成部分之一,对微热板结构及稳态热特性的研究至关重要。为了研究不同结构参数对微热板性能的影响,为微热板的设计优化提供指导,基于微机电系统(MEMS)工艺技术,设计了一种悬浮式结构微热板,对微热板支撑层和隔离层的材料组成、膜层厚度等因素进行了仿真研究。根据仿真结果,分析上述因素对微热板性能的影响趋势,得出了最优的参数设计。

Metal oxide semiconductor gas sensors are a hot topic in the field of gas sensors, and as one of the important components of metal oxide semiconductor gas sensors, the micro-hot plate is very important to the study of the structure and steady-state thermal characteristics of the micro hot plate.In order to study on influence of different structural parameters on the performance of the micro-hot plate, and to provide guidance for the design and optimization of the micro-hot plate, based on the micro-electro-mechanical system(MEMS) process technology, a suspended structure micro-hot plate is designed, and the material of the support layer and isolation layer of the micro-hot plate such as composition and film thickness are simulated.According to simulation results, trends on which factors impact on performance of micro-hot plate are obtained, on the basis, the optimal parameters design are obtained.