摘要
通过对电容式微机电系统(MEMS)压力传感器的结构和工作原理的分析,建立了基于随机模型的稳健设计数学模型,并且编写相应的算法程序,对稳健设计模型进行求解。结果表明:稳健设计方法不仅可以保证传感器具有较高的灵敏度,还能保证设计解的稳健性。
By analysis on structure and working principle of capacitive micro-electro-mechanical system(MEMS) pressure sensor, a robust design mathematical model based on stochastic model is established, and corresponding algorithm program is written to solve the robust design model is established.The results show that the robust design method can not only ensure high sensitivity of the sensor, but also the robustness of the design solution.
作者
吕博
谭晓兰
刘胜强
L Bo;TAN Xiaolan;LIU Shengqiang(College of Mechanical and Material Engineering,North China University of Technology,Beijing 100144,China)
出处
《传感器与微系统》
CSCD
北大核心
2021年第12期56-58,共3页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(51375017)。
关键词
压力传感器
稳健设计
随机模型
灵敏度
pressure sensor
robust design
stochastic model
sensitivity
