分布式老炼试验电源监视系统的研制

Development of Distributed Power Supply Monitoring System for Burn-in Tests

针对国内半导体检测机构老炼试验大规模依赖于人工的现状,研制了一种基于TCP/IP网络的分布式半导体器件老炼试验电源监视系统,介绍了系统结构和功能的设计方案,详细说明了具体实现方式和关键技术,包括多类型电源通信兼容性、接口转换与电磁隔离、通信速率优化和属性化任务管理等相关实现方案。该电源监视系统提高了半导体器件老炼试验的信息化水平,在降低成本的同时显著提升了试验质量,通过该系统可以监测器件正常老化、电源功能异常和夹具状态异常等试验过程数据,为设备维护和夹具设计提供了依据。该分布式老炼试验电源监视系统已应用于某半导体检测机构的可靠性试验系统中。

Aiming at the current situation that burn-in tests of domestic semiconductor testing institutions are still carried out manually on a large scale, a distributed power supply monitoring system for burn-in tests of semiconductor devices based on TCP/IP network was developed.The design schemes of system structure and function were introduced, and the specific implementation mode and key technology were explained in detail, including related implementation schemes such as the compatibility of multi-type power supply communication, interface conversion and electromagnetic isolation, communication rate optimization and attributed task management.By this power supply monitoring system, the informatization level of burn-in tests of semiconductor devices is improved, and the test quality is significantly improved while reducing the cost.Through this system, the test process data such as normal aging of devices, abnormal power supply functions and abnormal fixture state can be monitored, which provides a basis for equipment maintenance and fixture design.The distributed power supply monitoring system for burn-in tests has been applied in the reliability test system of a semiconductor testing institution.