摘要
电弧离子镀所制备薄膜中的大颗粒(MPs)缺陷是当前研究热点之一,本文利用尘埃等离子体理论,以Ti大颗粒为研究对象,对Ti大颗粒尺寸与其传输过程中的速度和能量变化进行了计算,解释了大颗粒在薄膜表面形貌变化的主要原因。在电弧等离子体传输过程中,在不同的工作距离下离子和电子的密度发生改变,大颗粒受到等离子体中离子和电子的碰撞,传输速度和能量发生变化,使得大颗粒在到达基体表面时保持半固态和液态。与基体表面发生碰撞后,大颗粒的形貌呈现扁平的椭圆形和长条形。
During arc ion plating process, the macroparticle defects are focused in recent years. The relationship between Ti macroparticle size, velocity and energy change in the spatial transmission was calculated, which was used to account for the main change reasons of the macroparticle morphology in the coatings surface. During the transmission process, the density of ions and electrons changed at different working distances. The Ti macroparticles were affected by the collisions of ions and electrons, which caused the velocity and energy changes of Ti macroparticles. The Ti macroparticles remained semi-solid and liquid when reaching the substrate surface. The morphologies of Ti macroparticles showed flat oval and strip after the collision with the substrate surface.
作者
魏永强
WEI Yong-qiang(School of Aeronautics and Astronautics,Zhengzhou University of Aeronautics,Zhengzhou 450046,China)
出处
《真空》
CAS
2021年第6期48-54,共7页
Vacuum
基金
国家自然科学基金资助项目(51401182)
河南省高等学校重点科研项目指导计划(22B430030)。
关键词
电弧离子镀
大颗粒
等离子体
速度
arc ion plating
macroparticles(MPs)
plasma
velocity
