二次离子质谱分析研究进展

Secondary Ion Mass Spectrometry Analysis Research Progress

二次离子质谱是一种用于分析固体材料表面组分的重要手段,广泛应用于化学、生物学、微电子、陶瓷、新材料研究等领域。基于二次离子质谱测试原理,分析了其在材料研究过程中的定性分析、杂质定量分析、深度剖面分析、分布成分分析等,为材料研究同行提供借鉴。

Secondary ion mass spectrometry is an important means for analyzing surface components of solid materials and is widely used in the research fields of chemistry,biology,microelectronics,ceramics,and new materials.Based on the principle of secondary ion mass spectrometry,the qualitative analysis,impurity quantitative analysis,depth profile analysis and distribution component analysis are carried out,so as to provide a reference for the material research peers.