磁悬浮转子真空计的研究历程

The Research History of Spinning Rotor Gauge

磁悬浮转子真空计被广泛应用于各个领域,在10;-1 Pa下具有相当高的精确度,以其优越的性能在其中占有重要地位,被广泛用于传递标准。然而,残余阻尼的存在严重影响了磁悬浮转子真空计的下限扩展,其中以涡流效应的影响最为显著,相对于涡流效应,测量产生的弛豫效应和科里奥利效应可以忽略不计。本文简要介绍了磁悬浮转子真空计的结构和原理,概述了其研究历程,重点阐述了残余阻尼和切向动量传递系数的相关研究,并分析并总结了一些重要因素对它们的影响。残余阻尼的相关研究主要从涡流效应、温度效应、弛豫效应、科里奥利效应和振动这几个方面进行了介绍;在切向动量传递系数方面上,主要说明了气体种类和压力对它的影响。最后提出了一些改进猜想及后续工作的研究方向。

pinning rotor gauge is widely used in various fields and has high accuracy at 10-4-1 Pa.It occupies an important position with its superior performance and is widely used for transmission standard.However,residual drag seriously affects the lower limit expansion of the spinning rotor gauge,among which the eddy current effect is the most significant.Compared with the eddy current effect,the relaxation effect and Coriolis effect can be ignored.This paper briefly introduces the structure and principle of the spinning rotor gauge,summarizes the research history of the spinning rotor gauge,and focuses on the related research on residual drag and tangential momentum accommodation coefficient.And this paper analyzes the influence of some important factors on them.The research on residual drag mainly introduces the eddy current effect,temperature effect,relaxation effect,Coriolis effect and vibration.In terms of tangential momentum accommodation coefficient,the influence of gas type and pressure on it is mainly explained.At last,some improvement conjectures and future research directions are proposed.