基于纳米ZnO触觉传感器的研究进展

Research Progress of Tactile Sensors Based on Nano-ZnO

触觉传感器因可以模仿人类皮肤感知外界信息而获得广泛的关注和研究,其中基于纳米ZnO的触感传感器及其阵列因具有高灵敏度、高机械强度、高柔韧性、生物兼容性好、低成本工艺等优点,在仿生机器人、人机交互、生物医学和可穿戴电子设备等领域具有广阔的应用前景。文中首先介绍了纳米ZnO触觉传感器基于压电效应的传感机理及其主要制备方法,然后从压电性能优化、多功能化、集成化、阵列化4个方面系统概述了纳米ZnO压电触觉传感器的研究进展,列举了相关技术领域与研究方向的最新成果,并讨论了ZnO触觉传感器在应力成像、人体运动和生理健康监测3个方面的应用研究,最后分析了其存在的不足和未来的主要研究方向。

Tactile sensors have received extensive attention and research because they can imitate human skin to perceive external information.Among varies kinds of tactile sensor,Nano-ZnO-based tactile sensor has broad application prospects in the fields of bionic robots,human-computer interaction,biomedicine devices and wearable electronic systems due to its advantages of high sensitivity,high mechanical strength,strong flexibility,easy integration,good biocompatibility,and low-cost technology.This paper firstly introduced the piezoelectric mechanism and the manufacturing of Nano-ZnO-based tactile sensor.Next,it summarized the study progress of Nano-ZnO piezoelectric tactile sensor from the four aspects of piezoelectric performance improvement,multi-function,integration,and array fabrication,and listed the latest achievements in related technical fields and research directions.Then it summarized the application research of Nano-ZnO piezoelectric tactile sensor in pressure imaging,human action detection and physiological health monitoring in detail,and analyzed the shortcomings and the research trend of Nano-ZnO piezoelectric tactile sensor.