摘要
为了在普通光学显微平台上实现对细胞生物样品的三维动态成像,设计光学显微平台与Mach-Ze-hnder干涉系统相结合的离轴数字全息显微测量系统,并且提出用连续高度变化的楔形样品对系统进行标定。介绍离轴数字全息显微的原理;基于倒置显微镜设计和搭建离轴数字全息显微系统;制备连续高度变化的楔形样品来标定离轴数字全息显微系统,并与白光干涉仪结果进行比较;通过测量出离轴数字全息系统可分辨的干涉条纹最小小数部分来实现系统的标定。实验结果证明了结合光学显微平台的离轴数字全息显微系统在样品三维测量上的优势,本系统能够分辨22.6 nm的高度变化量,因此,本系统的轴向分辨率应优于23 nm。
In order to realize the three-dimensional dynamic imaging of cell biological samples on the ordinary optical microscope platform, an off-axis digital holographic microscopic measurement system combining the optical microscope platform and the Mach-Zehnder interference system is designed, and a wedge shape with continuous height changes is proposed. The sample calibrates the system. Introduce the principle of off-axis digital holographic microscopy;design and build off-axis digital holographic microscopy system based on inverted microscope;prepare wedge-shaped samples with continuous height changes to calibrate off-axis digital holographic microscopy system, and compare with the results of white light interferometer;The calibration of the system is achieved by measuring the smallest fraction of interference fringes that can be resolved by the off-axis digital holographic system. The experimental results prove the advantages of the off-axis digital holographic microscopy system combined with the optical microscopy platform in the three-dimensional measurement of the sample. The system can resolve the height change of 22.6 nm, so the axial resolution of the system should be better than 23 nm.
作者
肖雨琪
张帆
XIAO Yuqi;ZHANG Fan(Beijing Information Science&Technology University,Beijing 100192,China;Beijing Engineering Research Center of Optoelectronic Information and Instruments,Beijing Information Science and Technology University,Beijing,100016,China)
出处
《激光杂志》
CAS
北大核心
2021年第12期181-185,共5页
Laser Journal
基金
国家自然科学基金:(No.61875237)。
关键词
光学显微平台
数字全息显微
离轴
楔形样品
标定
optical microscope platform
digital holography microscope
off-axis
wedge sample
calibration
