摘要
金属有机化学气相沉积(MOCVD)作为一种常见的金属材料制备方法,可在远低于金属熔点或分解温度的条件下制备各种金属薄膜、异质结构,这受到了研究者们的广泛青睐。而前驱体的热特性在很大程度上决定了铂薄膜的结构与性质。合适的MOCVD前驱体需要具有良好的挥发性、汽化时的热稳定性、在空气中稳定和易于制备的高产率。本文重点介绍了几种使用较广、性能优异的含铂材料制备的有机金属铂前驱体。
Metal organic chemical vapor deposition(MOCVD)is a common method for the preparation of metal materials,which can prepare various metal films and heterostructures far below the melting point or decomposition temperature of metals.The structure and properties of Pt films are largely determined by the thermal properties of the precursors.Suitable MOCVD precursors need to have good volatility,thermal stability during vaporization,stability in air and high yield.In this paper,the precursors of organometallic platinum prepared by several widely used and excellent platinum containing materials are introduced.
作者
曾旭钟
黎学明
杨文静
Zeng Xuzhong;Li Xueming;Yang Wenjing(School of Chemistry and Chemical Engineering,Chongqing University,Chongqing,400044)
出处
《当代化工研究》
2021年第23期139-141,共3页
Modern Chemical Research
基金
重庆市科技创新与应用开发重点项目“基于标准级测温用铂基敏感材料及器件研发与产业化”(编号:cstc2019jscx-fxydX0024)。
