摘要
介绍了离子注入机的整体结构及典型离子束生成系统的结构与工作原理。以表格的形式给出了常见的故障现象、可能原因及处理方法,对未来离子束生成系统的维修具有一定的指导作用。
The overall structure of ion implanter and the structure and working principle of typical ion beam generation system were introduced respectively.The common failures phenomena,possible causes and treatment methods were given in the form of table,would have a certain guiding role for the future maintenance of ion beam generation system.
作者
文黎波
张海明
王秀海
赵英伟
WEN Libo;ZHANG Haiming;WANG Xiuhai;ZHAO Yingwei(The 13^(th) Research Institute of CETC,Shijiazhuang 050051,China)
出处
《电子工业专用设备》
2021年第6期32-34,40,共4页
Equipment for Electronic Products Manufacturing
关键词
离子注入机
离子束生成系统
维修技术
Ion implanter
Ion beam generation system
Maintenance technology
