微机电系统压力传感器抗干扰系统设计

Design of Anti-interference System for Micro-electro-mechanical System Pressure Sensors

鉴于传统的硅基微机电系统(micro-electro-mechanical system,MEMS)压阻式压力传感器普遍存在温度漂移和时间漂移误差,采用恒温控制和恒流源自校正方法针对上述问题设计和研究了一种MEMS压力传感器抗干扰系统。首先,简单介绍了传感器的各项参数和温漂、时漂原理。其次,设计并制作了传感器相关外部抗干扰电路。最后,对该系统进行实验测试。结果表明:抗干扰系统能减小传感器温漂和时漂误差,热零点漂移的绝对值由恒温前的0.0652%FS/℃降至恒温后的0.00788%FS/℃,热灵敏度漂移的绝对值由0.118%FS/℃降至0.0153%FS/℃,时漂补偿后预测误差由-3.436~0.875 kPa降低至-2.086~1.765 kPa。该设计对MEMS压力传感器温漂、时漂补偿等抗干扰方面的研究具有一定参考价值。

It is well known that the traditional silicon micro-electro-mechanical system(MEMS)piezoresistive pressure sensors generally have temperature drift and time drift errors.In view of it,an anti-interference system for MEMS pressure sensors was designed by using the method of constant temperature control and constant current source correction.Firstly,the parameters of the sensor and the principles of temperature drift and time drift were briefly introduced.Secondly,an anti-interference circuit system related to sensor was designed and made.Finally,the system was tested experimentally.The results show that the temperature drift and time drift errors of the sensor could be reduced in the anti-interference system.The absolute value of thermal zero drift decreases from 0.0652%FS/℃to 0.00788%FS/℃after constant temperature,and the absolute value of thermal sensitivity drift decreases from 0.118%FS/℃to 0.0153%FS/℃.As the same,the prediction error decreases from-3.436~0.875 kPa to-2.086~1.765 kPa after time drift compensation.The design of anti-interference system has a certain reference value for temperature drift,time drift compensation of MEMS pressure sensor.