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电参数对CrN薄膜在去离子水环境下摩擦磨损性能的影响 被引量:1

Effect of Electrical Parameters on the Friction and Wear Properties of CrN Film in Deionized Water
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摘要 采用多弧离子镀方法,在不同偏压和靶电流下在GH05合金试样表面制备系列CrN薄膜,利用扫描电子电镜、X射线衍射仪、显微硬度计、多功能材料表面试验仪对薄膜的微观组织结构和力学性能进行测试分析。利用盐雾磨损试验机的球-盘摩擦方式研究各CrN薄膜在去离子水环境下与Si_(3)N_(4)球对磨的摩擦学性能。结果表明:随着偏压增大,CrN薄膜表面微颗粒大小逐渐减小,硬度增大,结合力先增大后减小,随着靶电流增大,CrN薄膜表面凹坑逐渐减小,硬度减小,结合力先增大后减小;随着偏压增大,CrN薄膜的平均摩擦因数先增大后减小,磨损体积先减小后增大,随着靶电流增大,CrN薄膜的平均摩擦因数先减小后增大,磨损体积先减小后增大,当偏压为-80 V,靶电流为100 A时制备的CrN薄膜在去离子水环境下具有最佳的摩擦学性能;CrN薄膜在去离子水环境下的磨痕形貌主要呈现磨粒磨损的沟槽形貌,同时表现出抛光效果。 Different kinds of CrN films were prepared by using multi-arc ion plating method on the surface of GH05 alloy sample by varying the bias voltage and target current.The microstructure and mechanical properties of the films were tested by scanning electron microscope,X-ray diffractometer,microhardness tester and multifunctional material surface tester.By using the ball-disk friction method of the salt spray abrasion tester,the tribological properties of five CrN films against Si_(3)N_(4) balls in deionized water were studied.The results show that with the increase of bias voltage,the surface micro particle size of CrN film decreases gradually,the hardness increases,and the adhesion first increases and then decreases,while with the increase of target current,the surface pits and hardness of CrN films decrease gradually,and the adhesion first increases and then decreases.With the increase of bias voltage,the average friction coefficient of CrN films first increases and then decreases,and the wear volume first decreases and then increases,while with the increase of target current,the average friction coefficient of CrN film decreases first and then increases,and the wear volume decreases first and then increases.When the bias voltage is-80 V and the target current is 100 A,the CrN film prepared has the lowest average friction coefficient and the smallest wear volume under the deionized water environment,which shows the best wear resistance among the different CrN films.The wear scar morphology of CrN film in deionized water environment mainly presents the groove morphology of abrasive wear,and also shows the polishing effect.
作者 柯庆航 詹华 王玉飞 袁祖浩 汪瑞军 KE Qinghang;ZHAN Hua;WANG Yufei;YUAN Zuhao;WANG Ruijun(Chinese Academy of Agricultural Mechanization Sciences,Beijing 100083,China;Beijing Golden Wheel Special Machine Co.,Ltd.,Beijing 100083,China;Luoyang Bearing Research Institute Co.,Ltd.,Luoyang Henan 471039,China;The 48th Research Institute,China Electronics Technology Group Corporation,Changsha Hunan 410000,China)
出处 《润滑与密封》 CAS CSCD 北大核心 2021年第12期136-141,共6页 Lubrication Engineering
基金 国家国防科技工业局项目(JPPT-135-GH-2-101)。
关键词 CRN薄膜 去离子水环境 摩擦磨损 靶电流 偏压 CrN film deionized water environment friction and wear target current bias voltage
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