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具有亚波长模式局域性的全介质反槽波导及其与输入/输出光纤的高效耦合

All-dielectric antislot waveguide with subwavelength mode confinement and its high-efficiency coupling with input/output fiber
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摘要 由于金属固有的欧姆损耗,表面等离子体波导通常具有较大的传输损耗。基于此,提出了一种全介质反槽波导结构,该波导可以同时实现亚波长模式局域性和理论上无损耗的传输,归一化模式面积可以达到3.4×10^(-2)。另外,为了实现该小尺寸反槽波导与输入/输出光纤的高效耦合,提出了一种高效的耦合方案,耦合效率可以达到92.7%,在y和z方向上1 dB损耗的耦合偏差均约为2μm。 Due to metallic ohmic loss,plasmonic waveguides usually have larger propagation loss.Here,an all-dielectric antislot waveguide was proposed,which can realize subwavelength mode confinement and theoretically lossless propagation simultaneously.A normalized mode area of 3.4×10^(-2) was achieved in the all-dielectric antislot waveguide.Moreover,an efficient coupling scheme between the small-size antislot waveguide and input/output fiber was proposed.An overall coupling efficiency of 92.7%was attained.The misalignment tolerance for 1 dB loss penalty was about 2μm in both y and z directions.
作者 岳文成 王庆 李欣雨 王书晓 余明斌 YUE Wen-Cheng;WANG Qing;LI Xin-Yu;WANG Shu-Xiao;YU Ming-Bin(Laboratory of Silicon-Based Materials and Integrated Devices,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;University of Chinese Academy of Sciences,Beijing 100049,China;Department of Electronic Engineering,Xi’an University of Technology,Xi’an 710048,China;Shanghai IndustrialμTechnology Research Institute,Shanghai 201800,China)
出处 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2021年第6期709-714,共6页 Journal of Infrared and Millimeter Waves
基金 Supported by National Key Research and Development Program of China(2019YFB2203502) Shanghai Sailing Program(20YF1456900) Strategic Pioneer Research Projects of Defense Science and Technology(XDB43020500) National Outstanding Youth Foundation of China(61904185)。
关键词 光子集成电路 纳米光子学 波导 photonic integrated circuits nanophotonics waveguide
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