微惯性测量组件高过载失效分析

Failure Analysis of Micro Inertial Measurement Module Under Condition of High Overload

微惯性测量组件凭借其精度高、体积小、质量轻、成本低、可靠性高等特点,广泛应用于制导武器领域。但目前微惯性测量组件在制导弹药高过载环境的应用中存在过载后失效和性能严重退化的问题,为了提高微惯性测量组件的抗过载性能,分别从微惯性测量组件系统整体角度和MEMS敏感结构的角度出发,对其失效形式进行分析,并通过有限元仿真分析进行了验证,明确了失效原因,为微惯性测量组件抗高过载设计提供了新的思路。

Micro inertial measurement module is widely used in the field of weapons and equipment because of its high precision,small volume,light weight,low cost and high reliability.However,there are some problems in the application of micro inertial measurement module in the high overload environment of guided ammunition.In order to improve the anti-overload performance of micro inertial measurement module,its failure forms were analyzed from the perspective of the overall system of micro inertial measurement module system and MEMS sensitive structure.It is verified by finite element simulation analysis,and the failure reason is clarified,which provides an idea for the anti-high overload design of micro inertial measurement module.