Evanohm合金的双环线型微加热器特性研究

Study on characteristics of Evanohm alloy micro-heater with double-loop structure

以Evanohm合金为材料,设计了一种双环线型微加热器。使用AC磁控溅射技术在硅基底上沉积合金薄膜,并采用微机电系统(MEMS)微加工工艺实现薄膜图形化,以此作为加热器的加热元件。在常温下,研究了所制备的薄膜加热器件的加热性能与电学特性,并在深低温下进一步测试了其电学性能。研究结果表明:此种微型加热器电阻值稳定。在[5,300]K的温度区间内,加热器的电阻值变化不超过2%;在40 K的温度,电阻值达到Kondo最小值;在[35,55]K的温度区间,温度系数降至8.9×10^(-6) K^(-1)。器件可在较宽低温区保持良好的电阻值稳定性,具有在低温环境中应用的潜力。

Using Evanohm alloy as the material,a loop structure micro-heater is designed.AC magnetron sputtering technology is used as the basic thin film deposition method to deposit the alloy on the silicon substrate,and MEMS micro-machining process is used to achieve thin film patterning to form the heating element of the heater.At room temperature,the heating performance and electrical characteristics of the prepared thin film heating device are studied,and the electrical performance is further tested at deep low temperature.The research results show that this type of micro-heater has stable resistance.In temperature range of 5~300 K,the resistance changes of the heater within 2%,and at 40 K,the resistance reaches the Kondo minimum.In the temperature range of[35,55]K,the temperature coefficient drops to8.9×10^(-6) K^(-1).The device can maintain good resistance value stability in a wide low temperature region,and has the potential for application in low temperature environments.