基于MEMS工艺的起爆序列设计研究

Design of Explosive Train Based on MEMS Technology

针对引信微小型化、轻量化设计的需求,本文采用微雷管驱动飞片冲击起爆传爆药的能量放大方式设计的起爆序列主要由起爆控制电路、微雷管、飞片、安全保险机构、传爆药等,采用表面微加工工艺、深硅刻蚀等工艺完成了微雷管的制作,采用UV-LIGA工艺完成了安全保险机构的制作。采用光子多普勒测速仪(PDV)对微雷管装药参数、传爆空腔参数、飞片参数与飞片速度关系规律的研究,获得了传爆序列的优化设计参数,即微雷管装药直径1.0 mm,装药密度2.1 g/cm^(3),传爆空腔尺寸Φ1.0 mm×H1.0 mm,飞片厚度为30μm。

The initiation train is designed by using the energy amplification method of flyer driven by energetic material meet to the requirement of miniature and lightweight design of fuze.The initiation train consists of control circuit,micro detonator,flyer,safety and arming device,booster and so on.The action process of the train is that the flyer driven by the detonator is accelerated by the cavity through the safety and arming device,and the high-speed flyer impacts to detonate the booster.Through the study of the relationship between the parameters of the primary charge,acceleration chamber,flyer and the initiation performance of the train by using the photonic doppler velocimetry(PDV).The ideal design parameters of the micro-initiator,flyer and acceleration chamber are obtained,i.e.,the diameter of the charge is 1.0 mm,the density of the charge is 2.1 g/cm;,the size of the acceleration chamber isφ1.0 mm×(H)1.0 mm,and the thickness of the flyer is 30 micrometer.