氮化硅粉体制备技术及粉体质量研究进展

Research advances in preparation technology and quality of silicon nitride powder

氮化硅(Si_(3)N_(4))具有优异的物化性能,在国防、电子信息等关键领域都占据重要的地位。高质量粉体是制备高性能Si_(3)N_(4)陶瓷的首要前提。通常高质量Si_(3)N_(4)粉体需要满足粒径细、分布窄、α相含量高、杂质含量低等条件。基于合成反应体系综述了当前国内外制备Si_(3)N_(4)粉体的方法,着重从强化传热与传质角度介绍了改善粉体质量的研究进展,并介绍了当前工业生产现状,展望了高质量Si_(3)N_(4)粉体制备技术的发展趋势和方向。

Silicon nitride(Si_(3)N_(4))has excellent physical and chemical properties and occupies an important position in key fields such as national defense and electronic information.High quality Si_(3)N_(4) powders are the primary prerequisite for the preparation of high performance Si_(3)N_(4) ceramics.The high-quality powder requisites the conditions of fine particle size with narrow distribution,highαphase,low impurity and so on.The research advances in preparation technology of silicon nitride powder are summarized from the point of the synthesis reaction system,with the emphasis on summarizing the progress of the improvement of powder quality by enhancing heat and mass transfer.In addition,the present situations of industrial manufacture are introduced,and the development trend and direction of the preparation technology of high quality Si_(3)N_(4) powder are also prospected.