电子厂房洁净室空调设计

Air conditioning design for clean room of electronic workshop

根据电子芯片的工艺特点,结合重庆市某12寸硅片加工厂房,从空调系统方案选择,空调负荷计算,空调风量计算,空调水系统设计等方面介绍了电子厂房洁净室的空调设计,并总结了设计过程中的一些要点,可为类似工程提供参考。

Based on the feat ures of the electronic chip,combined with a 12-inch wafers processing workshop in Chongqing,electronic workshop clean room air conditioning de-sign is introduced in aspects of the air-conditioning system scheme selection,air-condition-ing load calculation,air volume calculation,air-conditioning water system design,etc.This pa-per summarizes some key points in design process to provide a reference for similar projects.