摘要
三氟化硼作为一种常用的气体在半导体工业中发挥着重要的作用。高纯度的三氟化硼(>4N,>99.99%)可用于高新技术行业因而具有高的附加值、重要的研究意义和工业价值。对三氟化硼工艺包括冷阱法、吸附法、化学转化法及精馏法等进行了总结。
Boron trifluoride,as a commonly used gas,plays an important role in the semiconductor industry.Boron trifluo-ride(>4N,>99.99%)of high purity is of great research interest and industrial value because of its high added value for its utilization in the high technology industries.The processes of boron trifluoride,including cold trap,adsorption,chemical transformation and rectification were summarized.
作者
巩晓辉
任少科
常琳
李子宽
赵鹏德
范正林
GONG Xiaohui;REN Shaoke;CHANG Lin;LI Zikuan;ZHAO Pengde;FAN Zhenglin(Zhonghao Guangming Research and Design Institute of Chemical Industry Co. , Ltd. , Dalian 116031, China)
出处
《低温与特气》
CAS
2021年第6期8-11,共4页
Low Temperature and Specialty Gases
关键词
三氟化硼
低温精馏
纯化
boron trifluoride
cryogenic rectification
purification
