微纳力值测量技术发展现状与分析

Development status and analysis of micro nano force measurement technology

介绍了近年来微纳力值测试技术的发展现状。微纳力值测量方法、测量及研究成果,并进行了不同测试方法的对比,指出了不同测试方法的特点和适用性。基于当前微纳测量领域发展趋势,结合行业发展需求,提出了微纳力值测试技术研究应注意的问题。

The development status of micronewton/nanonewton force measurement technology in recent years is introduced. The measurement methods,measurement and research results of micronewton/nanonewton force value are compared,and the characteristics and applicability of different test methods are pointed out. Based on the current development trend of micronewton/nanonewton force measurement field and combined with the development needs of the industry,the problems needing attention in the research of micro nano force measurement technology are put forward.