贵金属超细丝材截面的EBSD与三维重构表征

EBSD and 3D reconstruction characterization of precious metal ultrafine wire sections

贵金属超细丝材常用于精密电子功能器件的关键位置,但由于其加工成品尺寸微细传统技术无法准确表征超细丝材的微观精细结构。采用聚焦离子束-电子背散射衍射(FIB-EBSD)联用的超细丝材截面制样与表征方法,精确表征出了4种不同材质贵金属超细丝材的晶粒、取向、织构以及晶界等微观结构信息;而3D EBSD三维重构技术将微观结构分析实现为3D动态过程,更加直观地反应出超细丝材的真实微观结构信息。

Precious metal ultra-fine wires are critical components in precision electronic functional devices.However, due to their ultrafine sizes, traditional techniques cannot accurately characterize the microstructures of ultrafine wires. By using a combination technique of a focused ion beam and an electron backscatter diffraction method,(FIB-EBSD) four precious metal ultrafine wires sections were prepared, and their microstructures of grain orientation, texture and grain boundary were accurately characterized. In addition, the 3D reconstruction technology(3D EBSD) realized the analysis of microstructures as a 3D dynamic process, which more intuitively reflects the true microstructure information of ultrafine wires.