摘要
为优化单层声表面波换能器的驱动性能,改善现有δ函数分析方法在计算过程中的不足之处,采用有限元仿真优化方法对叉指式换能器的静力学性能进行了分析,研究了支路电极宽度w、电极间距s和基片厚度t对驱动性能的影响。仿真结果表明,当w/t=0.7时,可以得到最佳应变响应;当s/t>3.2时,可以得到最大应变。同时还得出了电极间距越小,驱动电压越低的结论。根据仿真优化结果制备了声表面波叉指换能器(SAW-IDT),并进行了频率响应测试。研究结果为声表面波叉指换能器的制备、性能测试和应用提供了指导。
In order to optimize the actuating performance of single layer surface acoustic wave interdigital transducer(SAW-IDT)and to improve the deficiencies of calculation process of theδfunction analysis method,the static properties of the SAW-IDT were analyzed by the finite element simulation optimization method.The influence of the width of the branch electrodes(w),the electrodes interval(s),and the thickness of the substrate(t)on the actuating performance of SAW-IDT was investigated.The simulation results show that when w/t=0.7,the optimal strain response can be obtained;when s/t>3.2,the maximum strain can be obtained.Besides,it can also be concluded that the smaller the electrode interval,the lower the actuating voltage.According to the simulated optimization results,a SAW-IDT was prepared and the frequency response was tested by experiments.The results provide a guidance for the preparation,performance testing,and application of SAW-IDT.
作者
王自平
费跃
钱磊
薛显
Karthik Reddy
Wang Ziping;Fei Yue;Qian Lei;Xue Xian;Karthik Reddy(National Center for International Research on Structural Health Management of Critical Components,Faculty of Civil Engineering and Mechanics,Jiangsu University,Zhenjiang 212013,China;Department of Mechanical and Aerospace Engineering,North Carolina State University,Raleigh 27606,US)
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2021年第11期3917-3923,共7页
Rare Metal Materials and Engineering
基金
National Natural Science Foundation of China(11872191,11520101001)
Postgraduate Research&Practice Innovation Program of Jiangsu Province(KYCX20_3073)。
关键词
叉指换能器
结构优化设计
驱动性能
interdigital transducer
structural optimization design
actuating performance