碲锌镉晶体定向研究

Study on Crystal Orientation of CdZnTe

碲锌镉材料是制备高性能碲镉汞红外焦平面探测器不可或缺的衬底材料。液相外延工艺和分子束外延工艺分别需要使用(111)晶面和(211)晶面碲锌镉衬底制备碲镉汞薄膜材料。低偏角、高精度衬底的选取有利于高质量碲镉汞外延层的获得。介绍了孪晶线快速定向法、使用X射线衍射仪(X-Ray Diffractometer,XRD)定向法确定碲锌镉晶体(111)晶面以及用XRD由(111)晶面获得(211)晶面碲锌镉的方法。研究结果对高性能碲镉汞探测器研制具有重要意义。

CdZnTe material is an indispensable substrate material for the preparation of high-performance HgCdTe infrared focal plane detectors.The liquid phase epitaxy and the molecular beam epitaxy require the use of(111)and(211)CdZnTe substrates to prepare HgCdTe thin-film materials,respectively.The selection of low off-angle and high-precision substrates is conducive to the acquisition of high-quality HgCdTe epitaxial layers.The twin line rapid orientation method,the X-ray diffractometer orientation method to determine the(111)crystal plane of the CdZnTe crystal,and the method of obtaining(211)CdZnTe from(111)CdZnTe by X-ray diffractometer are introduced.The research results are of great sigificance to the development of high-performance HgCdTe detectors.