导模法晶体生长技术研究及应用

Study and application of the Edge-defined Film-fed Growth technique

在人工晶体生长技术中,导模法晶体生长技术具有"近净型"生长、材料利用率高、生长速度快以及易于实现多片晶体同步生长等优点,在晶体生长领域应用广泛,已被用于工业化生产硅、锗晶体和蓝宝石晶体等.介绍了导模法晶体生长技术国内外的研究现状,包括材料特性、生长工艺、应用领域、现存问题以及解决途径等,同时展示了同济大学在导模法生长蓝宝石多片、圆管、大尺寸板材等方面的研究成果,并展望了导模法晶体生长技术未来的发展方向以及在其他晶体材料生长方面的应用.

In the technology of artificial crystal growth,the edge-defined film-fed growth technique(EFG)has the advantages of near-net-type growth,high material utilization rate,fast growth speed and easy to realize the simultaneous growth of multiple crystals.Therefore,EFG has been widely used in the field of crystal growth and especially for industrialization production of silicon,germanium and sapphire crystals,etc.The current research status of EFG at home and abroad,including material properties,growth technology,application fields,existing problems and corresponding solutions,were demonstrated.At the same time,the research progresses of Tongji University in the EFG for growing multi-pieces sapphire,around tubes,large-size plates were introduced.The future development direction of EFG and its application in other crystal materials growth were also prospected.